| 摘要 |
PROBLEM TO BE SOLVED: To prevent generation of wear powder from a glass base-substrate by jetting out fluid from the side of placement surface for the glass base- substrate to thereby reduce friction of the base-substrate on the placement surface. SOLUTION: A plurality of receiving members 11a are installed in a receiption base 11 on which an air passage 11b is formed substantially in conformity with the centeral axis. In the passage 11b air with a specified pressure is made to flow through a regulation valve 15 and a solenoid valve 16. As a result, the member 11a has the same structure as the structure in which a nozzle for jetting air is embedded, and thereby the air from the nozzle is jetted to the rear surface of a glass base-substrate 10. The base-substrate 10 is slightly floated from the placement surface therefor through the air, and accordingly even if force form a side of its side surface thereof is applied to the basesubstrate 10, the friction between the base-substrate 10 and the placement surface can be reduced widely. |
