| 摘要 |
An MxN actuated mirror array for use in an optical projection system, wherein M and N are integers, including: an array of MxN electrodisplacive actuators wherein each of the MxN electrodisplacive actuators is provided with a top surface, a bottom surface, a pair of external sides and has a bimorph structure having a pair of layers of an electrodisplacive material, a common signal electrode located between the pair of layers of the electrodisplacive material, and a pair of reference electrodes provided on the external sides thereof an array of MxN mirrors wherein each of MxN mirrors is coupled with each of the MxN electrodisplacive actuators and is mounted on the top surface of each of the MxN actuators an active matrix substrate comprising a substrate and an array of MxN second conductive type MOSFETs formed on the substrate; and an array of MxN connecting terminals wherein each of the MxN connecting terminals, located between each of the actuators and the substrate, is used for electrically connecting the common signal electrode of each of the actuators with each of the MOSFETs.
|
