SIMULATION METHOD FOR FILM FORMATION AND ITS DEVICE,申请号JP19960095384-传众专利搜索

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发明名称	SIMULATION METHOD FOR FILM FORMATION AND ITS DEVICE
摘要
申请公布号	JPH09279340(A)	申请公布日期	1997.10.28
申请号	JP19960095384	申请日期	1996.04.17
申请人	MITSUBISHI HEAVY IND LTD	发明人	OHIRA TATSUYA
分类号	C01B33/02;C23C14/54;(IPC1-7):C23C14/54	主分类号	C01B33/02
代理机构		代理人
主权项
地址

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