FLUOROCARBON DECOMPOSING METHOD BY HIGH FREQUENCY PLASMA

摘要

PROBLEM TO BE SOLVED: To decompose fluorocarbon without generating CO or H2 being a harmful substance by blowing air in a high frequency plasma decomposition reaction furnace. SOLUTION: Fluorocarbon is heated by a heater 1 and mixed with steam heated by a heater 2. The mixed gas of fluorocarbon and steam is heated by a heater 3 to be supplied to a high frequency decomposition reaction furnace 4. Air for burning H2 and CO generated by this decomposition reaction to decompose them is supplied to the high frequency plasma decomposition reaction furnace 4 at the normal temp. from the shoulder part thereof and respective flow rates are controlled to predetermined flow rates by controlling flow rate regulating valves by a flow rate regulator FIC. The high frequency plasma decomposition reaction furnace 4 is composed of refractory such as alumina and a plasma torch 5 is provided in the head part of the furnace and the pressure in the furnace 4 is kept constant. A cooling can 6 is provided in the high frequency plasma decomposition reaction furnace 4 and decomposed gases are cooled in the throat 7 between the furnace 4 and the cooling can 6.