| 摘要 |
A substrate includes a flat principal member having a surface, and at least three first holding portions projecting from the principal member. Each of the first holding portions includes a pair of horizontal contact surfaces which are parallel to the surface of the principal member and which are disposed facing opposite to each other. At least three second holding portions are also disposed on the principal member, each of the second holding portions including a pair of vertical contact surfaces which are perpendicular to the surface of the principal member and are disposed facing opposite to each other. Method and apparatus for holding such a substrate includes structure and steps for grasping the at least three first holding portions and the at least three second holding portions. The structure and functions provide a platform for stably gripping a substrate.
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