| 摘要 |
PROBLEM TO BE SOLVED: To ensure adhesive and sealing properties even when the width of the top part of a partition of a pressure room is narrowed and to prevent pressure from leaking to the adjoining pressure room by dividing a piezoelectric element into a plurality of parts by the first wide and sharrow channels and the second narrow and deep channels. SOLUTION: A diaphragm 40 has an island 42 being an island-like thick part and the number of these islands is two-fold of pressure rooms 32 of a pressure room plate 30. The apex part of the even numbered island 42 is bonded to the free end part 22 of a piezoelectric element 20 and the back face of the odd numbered island 42 is bonded to the top part 36 of the partition 34 of a pressure room plate. The piezoelectric element 20 is divided into a plurality of parts by the first wide and shallow channels 24 and the second narrow and deep channels each with the same axial line as this channel 24. Practically, channel processing is performed by means of a wire saw in such a way that the first wide and shallow channels 24 with a channel width of approximately 100μm are processed by using a thick wire with a diameter of approximately 90μm. Strong tension is applicable to the thick wire to process a precise channel position.
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