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发明名称
摘要
申请公布号	JP2669358(B2)	申请公布日期	1997.10.27
申请号	JP19940238853	申请日期	1994.10.03
申请人		发明人
分类号	H01L21/22;H01L21/205;H01L21/26;(IPC1-7):H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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