| 摘要 |
PURPOSE:To enable prevention of contamination on a surface of a die to be improved by providing a heat-resistant breathing member on a heat block. CONSTITUTION:A lead frame 7 where a die 5 is die-bonded through a thermosetting adhesive 6 consisting of Ag, etc., is placed at a breathing member. 3 is carried in sequence on the breathing member 3 using tact feed by a drive means for curing. Thus. since the lead frame 7 can be placed on a heat block 1 with a heat-resistant breathing member 3 as a sheet, a contact area between the lead frame 7 and the breathing member 3 is wide and is in multiple contact, thus enabling conduction of heat to the lead frame 7 to be uniform. Namely, supply of heat to the heat block 1 to the lead frame 7 becomes uniform. Also, when eliminating impurity gas near a surface of the lead frame 7 by supplying a high-temperature gas 4 from an upper part of the lead frame 7, the breathing member 3 becomes a flow path for a high-temperature gas and the gas is discharged through a porous gap so that the high-temperature gas 4 flows while it covers a surface of the lead frame 7, thus causing the impurity gas to flow downward efficiently. |
