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发明名称
POWER SUPPLY SYSTEM FOR PLASMA SOURCE WITH NONINCANDESCENT COMPENSATING CATHODE
摘要
申请公布号
RU2094965(C1)
申请公布日期
1997.10.27
申请号
RU19940001076
申请日期
1994.01.11
申请人
OPYTNOE KONSTRUKTORSKOE BYURO "FAKEL"
发明人
NESTERENKO ALEKSANDR N;ARKHIPOV BORIS A;KOZUBSKIJ KONSTANTIN N
分类号
H05H1/54;F03H1/00
主分类号
H05H1/54
代理机构
代理人
主权项
地址
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