发明名称 |
PHOTORESIST STRIPPING COMPOSITIONS |
摘要 |
A non-aqueous negative photoresist stripping composition which consists essentially of about 40 to 85 % by weight of an alkylnaphthalene solvent, about 5 to 20 % by weight of an alkyl phenol which provides a corrosion inhibitory effect, about 5 to 20 % by weight of a linear monoalkylbenzene sulfonic acid which is a surfactant and about 1 to 10 % by weight of a dialkylbenzene sulfonic acid. There is further provided a process for removing coatings from a photoresist with the compositions of the invention.
|
申请公布号 |
WO9739092(A1) |
申请公布日期 |
1997.10.23 |
申请号 |
WO1997US04420 |
申请日期 |
1997.03.20 |
申请人 |
ASHLAND INC. |
发明人 |
WARD, IRL, E.;MICHELOTTI, FRANCIS, W. |
分类号 |
C11D1/22;C11D3/18;C11D3/20;C11D3/34;G03F7/42;(IPC1-7):C11D1/22;C11D3/44;C23G5/024 |
主分类号 |
C11D1/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|