发明名称 PHOTORESIST STRIPPING COMPOSITIONS
摘要 A non-aqueous negative photoresist stripping composition which consists essentially of about 40 to 85 % by weight of an alkylnaphthalene solvent, about 5 to 20 % by weight of an alkyl phenol which provides a corrosion inhibitory effect, about 5 to 20 % by weight of a linear monoalkylbenzene sulfonic acid which is a surfactant and about 1 to 10 % by weight of a dialkylbenzene sulfonic acid. There is further provided a process for removing coatings from a photoresist with the compositions of the invention.
申请公布号 WO9739092(A1) 申请公布日期 1997.10.23
申请号 WO1997US04420 申请日期 1997.03.20
申请人 ASHLAND INC. 发明人 WARD, IRL, E.;MICHELOTTI, FRANCIS, W.
分类号 C11D1/22;C11D3/18;C11D3/20;C11D3/34;G03F7/42;(IPC1-7):C11D1/22;C11D3/44;C23G5/024 主分类号 C11D1/22
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