| 摘要 |
Method and device for stepwise and automatic loading and unloading of a coating installation (1) having disc-shaped substrates, in particular for data storage technology, essentially comprising - a magazine (2) with a first rotary table (4) which can be rotated in a stepwise manner about a fixed axis of rotation, and a multiplicity of holding mandrels (6, 6', ...) which are arranged on the rotary table (4) with an equidistant distribution and in a circular shape, a plurality of substrates (7, 7', ...) being able to be stacked on each mandrel (6, 6', ...) and fixed loading (9) and unloading stations (10, 11) being provided for the magazine (2), - a transfer device (3) having a second rotary table (12) which can be rotated in a stepwise manner about a fixed axis of rotation (13) and which has at least three stations for accommodating one substrate (18, 18', ...) in each case and having at least three transport arms (19, 20, 21) which correspond in each case to one station of the second rotary table (12) and - a control device (33), which in particular comprises a sensor (29), a counting mechanism (30) and a servo motor (31), the servo motor (31) driving the unloading arm (21) and the mandrel (6, 6', ...) to be loaded of the magazine (2) being able to be determined in advance by the control device (33). <IMAGE> |
