Multi-channel, rf-excited gas discharge laser

摘要

The invention relates to a multi-channel RF-excited gas laser device which has an elongate tubular dielectric housing 1. The housing has a common elongate ground electrode 2 therewithin and a plurality of laser channels 4 defined within and extending along the ground electrode 2 adjacent to an interior surface 3 of the dielectric housing. A laser gas is provided within the dielectric housing and a plurality of RF electrodes 7 are disposed adjacent to and extending along an external surface 8 of the dielectric housing 1. Each RF electrode 7 is disposed in registration with one of the laser channels 4. <IMAGE>