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经营范围
发明名称
ELECTRON BEAM LITHOGRAPHY MACHINE
摘要
申请公布号
EP0801811(A1)
申请公布日期
1997.10.22
申请号
EP19940923692
申请日期
1994.06.28
申请人
LEICA LITHOGRAPHY SYSTEMS LTD.
发明人
STURROCK, JOHN, MONRO;DEAN, ANDREW
分类号
H01J37/20;H01J37/30;H01J37/304;H01J37/305;(IPC1-7):H01J37/304
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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