| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to suppress any drop in throughput by providing bi-directional communicating means between equipments, obtaining information showing processing situation of each equipment through communicating means and providing inline process monitor means for controlling each equipment based on these information. SOLUTION: Carrier means 5 and communicating means 6 are provided between two continuous equipment, and also inline process monitor means 7 are provided. And respective communicating means 8 is provided between the inline process monitor means 7 and equipment 1 to 4. Equipment 1 to 4 output completion signals to the monitor means 7 at the time when the production processing is completed within the equipment and the exchange of products with other equipment has become possible. Monitor means 7 output synchronous signals for synchronously operating the whole of the inline process to the equipment 1 to 4. By doing this, the throughput of the whole of the system is always aligned with the slowest equipment, and further the throughput of the equipment 1 to 4 can be recognized in real time.</p> |
