发明名称 |
Apparatus for optically detecting displacement of an object using a synthesizing means utilizing a substrate with two diffraction gratings thereon |
摘要 |
A displacement detection apparatus includes a light source (1), a first diffraction grating (G1) which is arranged on the same substrate as a second diffraction grating (G2) so as to diffract and split light emitted from the light source and to irradiate +/-1st-order diffracted light beams onto the second diffraction grating (G2), a third diffraction grating (G3) for synthesizing a +1st-order reflectively diffracted light beam generated by reflectively diffracting the +1st-order diffracted light beam by the second diffraction grating, and a -1st-order reflectively diffracted light beam generated by reflectively diffracting the +1st-order diffracted light beam by the second diffraction grating to form interference light, and a light-receiving element (3) for converting the interference light into a signal representing a displacement of the substrate.
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申请公布号 |
US5680211(A) |
申请公布日期 |
1997.10.21 |
申请号 |
US19950525249 |
申请日期 |
1995.09.08 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KANEDA, YASUSHI;ISHIZUKA, KOH;KONDO, HIROSHI;ISHII, SATOSHI |
分类号 |
G01B11/00;G01B11/24;G01D5/38;G01P3/36;(IPC1-7):G01B11/02;G01D5/34;G01J9/00 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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