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发明名称
PLASMA GENERATING DEVICE
摘要
申请公布号
JPH09275096(A)
申请公布日期
1997.10.21
申请号
JP19960083895
申请日期
1996.04.05
申请人
ULVAC JAPAN LTD
发明人
HAYASHI TOSHIO;ITO MASAHIRO
分类号
H05H1/46;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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