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发明名称
ETCHING METHOD
摘要
申请公布号
JPH09275098(A)
申请公布日期
1997.10.21
申请号
JP19960104801
申请日期
1996.04.03
申请人
CASIO COMPUT CO LTD
发明人
ABE KAZUYUKI
分类号
C23F1/26;H01L21/308;(IPC1-7):H01L21/308
主分类号
C23F1/26
代理机构
代理人
主权项
地址
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