| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a transfer tray wherein an object such as a wafer to be transferred is mounted on a specified position and does not move from the specified position when it is mounted, or mounted and transferred. SOLUTION: The transfer tray 1 is for transferring a wafer W mounted thereon. In the transfer tray 1, a number of air vent holes 4 which prevent an air layer from being formed between a mount surface Wa of the wafer W and a bottom surface 2a of a containing recessed part 2 of the transfer tray 1 when the wafer W is mounted on the transfer tray 1 are formed to constitute a configuration which is approximately the same as that of the mount surface Wa of the water W inside a region B of the bottom surface 2a of the transfer tray 1 at approximately equal density.</p> |
