LASER IRRADIATION DEVICE AND LASER IRRADIATION METHOD

摘要

PROBLEM TO BE SOLVED: To attain the annealing of wide area by arranging the relation between the length of linear beam at an irradiated surface and the number of cylindrical lenses that comprise a homogenizer to satisfy specific relations. SOLUTION: Homogenizers 102 to 105 comprise the aggregate of cylindrical lenses. The homogenizers 102 to 105 divide the parallel beams of the laser beam oscillated by a laser oscillator 101 vertically and correct them optically in the vertical direction. The length of linear laser beam at the irradiated surface is x and the number of cylindrical lenses that comprise the homogenizers 102 to 105 is y. The x and y satisfy the equation that is expressed by (43/600)×-(1/6)<=y<=(x/5). The unit of x is mm. The condition that the length of the laser beam in the direction of the length divided by the number of cylindrical lenses is in the range of 5mm to 15mm is required. With this, wide area can be annealed uniformly.