Synthetic diamond film with reduced bowing and method of making same

摘要

A synthetic diamond film structure, comprising a generally planar free standing layered diamond structure having a surface area of at least 1000 square millimeters, having the following layers: a first layer having a first thicknesss and a relatively low intrinsic stress; and second layer having a second thickness and a relatively high intrinsic stress; the first thickness being sufficiently thick to prevent the diamond structure from bowing by more than a given distance.