| 摘要 |
PROBLEM TO BE SOLVED: To reduce the load of a host computer, by forming a proper first error code corresponding to the kind of a generated error, converting the first error code into a specified second error code and outputting it. SOLUTION: An error code converting program is previously inputted in a control part. A database constituted of a second error code which is common in a first and a second reducing projection aligners 3 and 4 and a resist coating developing equipment 5 is stored in a second memory part. When an error is generated in the first reducing projection aligner 3, the corresponding control part starts an error code converting program, and forms a first error code corresponding to the kind of a generated error. The control part retrieves the database on the basis of the first error code, converts it into a second error code corresponding to the first error code, and outputs the second error code to a host computer 2. Thereby the load of the host computer can be reduced. |
