FIB/SEM COMPOUNDED APPARATUS

摘要

PROBLEM TO BE SOLVED: To carry out SEM(scanning electron microscope) observation of a cross section of a specimen which is processed with high precision by FiB (focused ion beam) processing while preventing charging up. SOLUTION: A means to radiate beam to an electrode is installed in a SEM apparatus 2 which accelerates and converges electrons to scan a specimen 4 and forms on observation image be secondary electrons and reflected electrons generated by the specimen 4. This compounded apparatus comprises a SEM apparatus part of which a normal SEM mode and a secondary electron generating mode by irradiation of the electrode can be selectively employed, an FIB apparatus part 1 having a scanning ion microscopic function to accelerate and converge ions 11 and scan the specimen 4 and form an observation image by secondary electron signals emitted out of the specimen 4 and a function to irradiate a defined region of the specimen 4 selectively with converged ions and process the specimen 4, and a specimen chamber part 3 to hold the specimen in vacuum and the FIB 1 and the SEM 2 are so arranged as to cross respective beam axes of the FIB 1 and the SEM 2 approximately at the same position of the same specimen.