ELECTROPHOTOGRAPHIC PHOTORECEPTOR AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To produce a photoreceptor without causing the melt sticking of a toner even when the photoreceptor is used for a long time by forming a surface layer of non-single crystal carbon on a photoconductive layer and subjecting the surface to etching with a gas containing oxygen atoms and to fluorination treatment with a gas containing fluorine atoms. SOLUTION: A surface layer 304 comprising non-single crystal carbon containing at least hydrogen is formed on a photoconductive layer 303. A gas containing oxygen atoms is decomposed to produce plasma by high frequency electric power to produce oxygen radicals, by which the adsorption site of the surface of the surface layer 304 is selectively etched. The amt. of etching is preferably >=5Åin the film thickness direction and the film thickness of the remaining non-single crystal carbon film is preferably >=100Å. Then the surface layer 304 is fluorinated in plasma prepared by decomposition of a gas containing fluorine atoms. The amt. of etching is preferably more than the thickness of a single atom layer and less than the surface roughness.