| 摘要 |
PROBLEM TO BE SOLVED: To prevent film peeling in a stage for producing color filter substrates to be used for a liquid crystal display device. SOLUTION: A silicon oxide (SiOx) film 14 is interposed as a buffer layer between an overcoating layer 13 covering the colored layer 12 of the color filter substrate and a transparent conductive layer 15. The oxygen atom ratio of this silicon oxide film 14 is specified to <=1.4 and the thickness of the silicon oxide film is specified to <=500 angstrom. The silicon oxide film is so formed that the oxygen content ratio increases gradiently or stepwise from the overcoating layer 13 toward the transparent conductive layer 15 side. |
