| 摘要 |
The method of fabricating an optical waveguide device of the present invention is applicable to an optical waveguide device having at least two asymmetric electrodes for applying an electric field to an optical waveguide formed on a substrate of a ferroelectric crystal. The method is characterized by that annealing at a high temperature is carried out for the substrate and the electrodes after the electrodes have been formed on the substrate. The annealing temperature is 100 DEG C. or over, for example. By carrying out such annealing, the operating characteristic of the optical waveguide device, the operating point of a Mach-Zehnder type optical modulator, for example, can be stabilized.
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