| 摘要 |
The invention relates to a material-irradiation device having a radiation source (1) producing a machining beam (2), a beam separation device (10A, 10B, 10C, 10D) downstream of said beam source and used to divide the machining beam into a plurality of partial beams (12A, 12B, 12C, 12D). Each partial beam can be guided independently of the other partial beams at various points on at least one workpiece (13A, 13B, 13C, 13D) to be machined by a deflection means associated therewith. The workpiece to be machined rests on one workpiece displacement device (14A, 14B, 14C, 14D) movable in at least one axis. The machining beam is subsequently incident on a plurality of beam separation devices (10a, 10B, 10C), said beam separation devices are arranged to be moveable in the axis of the machining beam (2) incident thereon, the partial beams (12A, 12B, 12C) emerging from the beam separation devices reach simultaneously the surface of the workpiece on the workpiece displacement device, and the workpiece movement device is arranged to be moveable at least in one co-ordinate direction which deviates from the axis of movement of the beam separation devices. The process according to the invention for operation of the material-irradiation device is characterised in that the deflection devices of the partial beams can guide at least two, preferably at least four partial beams simultaneously on at least one point on the surface of the workpiece. |
