| 摘要 |
The present invention is directed to electrostatic chucks, methods for their use, the electrostatic deposition of objects, such as particles in a dry powder, onto recipient substrates, and the recipient substrates themselves that have been subjected to electrostatic deposition. In one aspect, the present invention provides an electrostatic chuck (620) for electrostaticall y attracting an object (680) or objects wherein the object is used in chemical or pharmaceutical assaying or manufacturing. The object can be pharmaceutica l substrates, for example, such as a pharmaceutical tablet. Additional embodiments of the invention provide chucks and their use to electrostatical ly attract particles, such as pharmaceutical active ingredient, to a substrate, such as a tablet. In one aspect, the electrostatic chuck (1110) includes a floating electrode (1170), thereby providing for charge imaging for the deposition particles in a selected image. Additionally, the invention provid es a sensing electrode (1310), optionally for use with an electrostatic chuck, for sensing the number of particles attracted to the objects on the chuck or other substrate, thereby providing for deposition of an accurate amount of particles. Furthermore, the present invention provides objects having select ed areas in which particles are applied to the object via electrostatic means.< /SDOAB> |
