| 摘要 |
<p>A confocal optical apparatus provided with a point light source array adapted to generate light from a plurality of arranged point light sources, an objective lens adapted to focus the light generated by this point light source array on an inspection surface, and a light-receiving element array in which a plurality of light-receiving parts for receiving light reflected from an object to be measured on the inspection surface via the objective lens are arranged. The sizes of the light-receiving parts are varied in accordance with the aberrations of the objective lens so that the aberrations and distortion may be absorbed reliably without improving the performance of the lenses used in the confocal optical system, and a correct and highly accurate measurement may be conducted.</p> |
