LINEARE MIKROWELLENQUELLE ZUR PLASMABEHANDLUNG VON FLÄCHEN.,申请号DE19946005546-传众专利搜索

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发明名称	LINEARE MIKROWELLENQUELLE ZUR PLASMABEHANDLUNG VON FLÄCHEN.
摘要
申请公布号	DE69405546(D1)	申请公布日期	1997.10.16
申请号	DE19946005546	申请日期	1994.02.17
申请人	COMMISSARIAT A L'ENERGIE ATOMIQUE, PARIS, FR	发明人	BRIFFOD, GEORGES, F-38180 SEYSSINS, FR;NGUYEN, TRONG, KHOI, F-38120 SAINT-EGREVE, FR
分类号	H05H1/18;H05H1/46;(IPC1-7):H05H1/18	主分类号	H05H1/18
代理机构		代理人
主权项
地址

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