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发明名称
HANDOTAISHIKIKASOKUDOSENSAOYOBISONOSEIZOHOHO
摘要
申请公布号
JP2663710(B2)
申请公布日期
1997.10.15
申请号
JP19900312028
申请日期
1990.11.16
申请人
FUJI DENKI KK
发明人
MURAMATSU YOSHIHISA
分类号
G01P15/12;H01L29/84;(IPC1-7):H01L29/84
主分类号
G01P15/12
代理机构
代理人
主权项
地址
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