Method of making diamond film and use of same

摘要

Polycrystalline diamond film material obtainable by chemical vapor deposition has an optical absorbence of less than 10 per centimeter and a lateral thermal conductivity by conveying wave of at least about 13 watts per centimeter per degree Celsius. The diamond film with substantially no non-diamond carbon and a high thermal conductivity is deposited by means of a direct current arc jet apparatus with a substrate temperature below about 975 degrees Celsius, an arc power of between about 20 and 40 kw. a pressure of about 1.60 kPa (12 torr), and an enthalpy greater than 30 from a activated gas jet fed with hydrogen and methane, the methane being supplied at a concentration of less than 0.07%. The resulting material has a high transparency and thermal conductivity. Also disclosed is the use of the diamond material made by the present method for cutting tool applications, particularly milling.