发明名称 HANDOTAISOCHI
摘要 PURPOSE:To prevent the deterioration of a waveform by a method wherein a transmission line for making an exchange of an electrical signal with one terminal provided on a semiconductor chip is constituted into a hierarchical structure consisting of two layers or more and the upper and lower layer transmission lines of the transmission line are connected to each other by at least two pieces or more of connection conductors. CONSTITUTION:One end of a bonding wire 2 is connected to a bonding pad formed on a semiconductor chip 1. A transmission line 13 constituted into a two-layer hierarchical structure is connected to the other end of the wire 2. This line 13 constituted into a two-layer hierarchical structure is constituted of upper and lowe layer transmission lines 31 and 32 and via metals 41 and 42, which are connected with the lines 31 and 32 at both ends of each via metal. That is, as the line 13 is constituted into a two-layer hierarchical structure and the lines 31 and 32 are provided in such a way that they are connected to each other by two pieces of the metals 41 and 42, a transmission path can be made into two kinds like transmission paths A and B. Thereby, the deterioration of a waveform stops generating.
申请公布号 JP2663178(B2) 申请公布日期 1997.10.15
申请号 JP19890244529 申请日期 1989.09.20
申请人 HITACHI SEISAKUSHO KK 发明人 KAMATA CHOSHI
分类号 H01L21/60;H01L23/12 主分类号 H01L21/60
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