| 摘要 |
PURPOSE:To accurately detect a register mark by extracting the intersecting point with a triangular mark by a unidimensional image sensor to calculate the shape and arrangement of the mark and using one mark as a reference mark and setting the relative position of the other object mark to a target position to measure the same and calculating the shift of both marks. CONSTITUTION:A mark is formed into a right-angled triangle and a shift calculation part sets the register mark calculated in a first mark calculation part to a reference mark to calculate the relative shift data A, B, C with the mark positions calculated in second - fourth mark calculation parts. The distance L0 between the origin A and an n-th point in a y-direction is the difference between the start position of a frame and the start position of scanning (n) and the length L1 between an n-th point, an (n+1)-th point, an (n+2)-th point ...in the y-direction is the interval of a trigger. The scanning line starting from the n-th point intersects points B, C to detect a binarizing signal and the scanning line starting from the (n+1)-th point intersects points D, E to output a binarizing signal. That is, the x, y coordinates of an end point B are xb, yb and, in the same way, points C, D, E are obtained. |
