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发明名称
SHIRIKONKIBANNOSEIJOKAHOHO
摘要
申请公布号
JP2663518(B2)
申请公布日期
1997.10.15
申请号
JP19880136956
申请日期
1988.06.02
申请人
NIPPON DENKI KK
发明人
HIRAYAMA HIROYUKI
分类号
C30B23/08;C23C14/02;C23C16/02;C30B25/02;C30B25/18;C30B29/06;H01L21/203;(IPC1-7):C30B23/08
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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