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发明名称
JIKIHOISENSA
摘要
申请公布号
JP2663460(B2)
申请公布日期
1997.10.15
申请号
JP19870255251
申请日期
1987.10.09
申请人
DENSOO KK
发明人
KAMATA TADASHI
分类号
G01R33/09;G01C17/32;G01R33/06;H01L43/08;(IPC1-7):G01R33/09
主分类号
G01R33/09
代理机构
代理人
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地址
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