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发明名称
HANDOTAISOCHI
摘要
申请公布号
JP2664527(B2)
申请公布日期
1997.10.15
申请号
JP19900189903
申请日期
1990.07.16
申请人
MITSUBISHI DENKI KK
发明人
FUJII TAKAYUKI
分类号
H01L29/812;H01L21/28;H01L21/338;(IPC1-7):H01L21/338
主分类号
H01L29/812
代理机构
代理人
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地址
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