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发明名称
Fabrication methods for micromechanical elements
摘要
申请公布号
EP0522787(B1)
申请公布日期
1997.10.15
申请号
EP19920306093
申请日期
1992.07.01
申请人
XEROX CORPORATION
发明人
BOL, IGOR I.
分类号
F16C33/14;G03F7/00;C23F17/00;B23P11/00;B23P15/00;(IPC1-7):G03F7/00
主分类号
F16C33/14
代理机构
代理人
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地址
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