| 摘要 |
PURPOSE:To produce the metal/org. high molecular synthetic resin-conjugated material having high adhesive strength by forming a functional group on the surface of an org. high molecular synthetic resin film by an electron cyclotron resonance plasma device and forming a metallic film thereon. CONSTITUTION:The surface of the film of an org. high molecular synthetic resin such as polyimide is exposed to the chemically reactive vapor-phase molecule or vapor-phase ion generated by an electron cyclotron resonance plasma device. The kinetic energy is held at 1-20eV, and the resin exhibiting a high ionization rate at the energy is pref. As a result, a functional group is formed on the surface which is reformed. The thickness of the reformed layer is preferably controlled to <=100Angstrom , the cohesive failure is substantially avoided, and a decrease in the mechanical strength is prevented in the org. film. A metallic film is then formed on the surface-treated synthetic resin film, and a coordinate bond is preferably formed. In this case, a stable complex of the functional group and metal is preferably formed. Consequently, a metal-org. high molecular synthetic resin-conjugated material having >= about 200g/cm peel strength and also with high adhesive strength is obtained. |
