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发明名称
FUKIHATSUSEIHANDOTAIKIOKUSOCHI
摘要
申请公布号
JP2663887(B2)
申请公布日期
1997.10.15
申请号
JP19940294865
申请日期
1994.11.29
申请人
NIPPON DENKI KK
发明人
OOTA TOMOYUKI
分类号
H01L21/8247;H01L27/115;H01L29/423;H01L29/788;H01L29/792;(IPC1-7):H01L21/824
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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