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发明名称
HANDOTAISOCHINOSEIZOHOHO
摘要
申请公布号
JP2663869(B2)
申请公布日期
1997.10.15
申请号
JP19940176381
申请日期
1994.07.28
申请人
NIPPON DENKI KK
发明人
SAMOTO NORIHIKO
分类号
H01L21/76;H01L21/338;H01L29/778;H01L29/812;(IPC1-7):H01L29/778
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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