| 摘要 |
A polishing apparatus includes a table on which an abrasive cloth is removably applied and an abrasive cloth replacing unit for automatically replacing the abrasive cloth locating on the table with a new abrasive cloth. The replacing unit includes a cloth storage device for storing a plurality of unused abrasive cloths, an abrasive cloth carrier and an abrasive cloth applier. The cloth carrier picks up an abrasive cloth located on the table and carries it to a disposal site and then picks up a new abrasive cloth from the cloth storage device and carries it to the table. The cloth applier presses an abrasive cloth against the table.
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