发明名称 Target mounting-demounting arrangement
摘要 In order to permit a mounting and demounting of targets free of tools and essentially of friction, snap pins are provided on the system side which, when the target is inserted, automatically engage in a groove which is machined laterally into the target. A releasing slide permits the return of the pins. When the cooling system is acted upon by pressure, a heat transfer membrane is placed against the rear of the target and presses the target onto the snapped-in pins. The pins are released by a releasing slide after the cooling system is relieved from the pressure.
申请公布号 US5676810(A) 申请公布日期 1997.10.14
申请号 US19950410793 申请日期 1995.03.27
申请人 BALZERS AKTIENGESELLSCHAFT 发明人 SCHWENDENER, URS
分类号 C23C14/24;C23C14/34;H01J37/34;(IPC1-7):C23C14/34 主分类号 C23C14/24
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