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发明名称
Mechanical sensor
摘要
申请公布号
EP0618628(B1)
申请公布日期
1997.10.15
申请号
EP19940104929
申请日期
1994.03.29
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
SAITOU, SHINJI
分类号
C23C16/06;G01L1/00;H01L41/12;(IPC1-7):H01L41/12
主分类号
C23C16/06
代理机构
代理人
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