| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a chemical supply piping structure, in which a signal line is integrally incorporated in piping, piping construction and wiring construction are simultaneously performed and a bore is small, and which is rich in flexibility. SOLUTION: Piping is formed by an inner pipe 1 and an outer pipe 2, and the outer pipe 2 is formed by joining two-split half members 2a, 2a having a circular section to each other and pressing the same by heat fusion. A signal wire 14 is buried in the half members 2a, 2a at the time of forming, ribs 3 are projected on the inner peripheries of the half members 2a, 2a, and the projecting tips of the ribs 3 are brought into contact with the outer peripheral surface of the inner pipe 1, thereby holding the inner pipe 1 and forming a cavity part 4 on the outer periphery of the inner pipe 1.</p> |
