| 摘要 |
PROBLEM TO BE SOLVED: To make the total length increase of equipment equal to the total length increase of an actuator, and exclude superfluous increase for temperature compensation, when the total length of a piezoelectric actuator is extended in order to increase the original displacement of the actuator, and temperature compensation is applied to the actuator. SOLUTION: This piezoelectric actuator is provided with a piezoelectric actuator 1 which is constituted of piezoelectric material and generates displacement in response to a voltage applied from the outside, and a spring system (bellows) 3 which peviously applies compression along the axis showing the direction of generated displacement to the actuator. The amount of thermal distortion due to thermal expansion of the actuator 1 is made equal to the amount of elastic distortion of the actuator 1 which is caused by the change of the compressive due to thermal expansion of the spring system 3. |
