发明名称 |
Scanning electron microscope |
摘要 |
A scanning electron microscope comprising an objective lens for forming lens magnetic field on the sample side, and observing the image of the sample after detecting the secondary electrons from the sample on the upper side of the objective lens is disclosed. The accelerating electrode is arranged along the electron beam passage of the objective lens, and an positive potential is applied thereto. The electric field correction electrode is disposed outside the accelerating electrode or to the sample side. A negative potential is applied to the electric field correction electrode. An image observation with high resolution also is realized even when the sample is inclined.
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申请公布号 |
US5677530(A) |
申请公布日期 |
1997.10.14 |
申请号 |
US19960668177 |
申请日期 |
1996.06.21 |
申请人 |
HITACHI, LTD. |
发明人 |
SATO, MITSUGU;HOYA, RYUJI;OSE, YOICHI |
分类号 |
H01J37/141;G01R31/305;H01J37/147;H01J37/153;H01J37/244;H01J37/28;(IPC1-7):H01J37/28 |
主分类号 |
H01J37/141 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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