发明名称 Semiconductor apparatus and production method for the same
摘要 A gate wire is formed so as to extend from an active area to a separation, and an impurity diffused area is formed on each side of the gate electrode located on the active area. A contact member for connecting the gate wire to a first layer aluminum interconnection formed in an upper layer of the gate wire is in contact with the gate wire at a portion located on the active area. The utilization ratio of the active area is thus improved, and hence, the width of the separation can be minimized. In addition, by eliminating a mask alignment margin from the gate wire and suppressing the width of the gate wire not to exceed the width of the contact member, the occupied area of a semiconductor apparatus can be reduced.
申请公布号 US5677249(A) 申请公布日期 1997.10.14
申请号 US19960670927 申请日期 1996.06.26
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 FUKUI, MASAHIRO;SEGAWA, MIZUKI;AKINO, TOSHIRO;MATSUMOTO, MICHIKAZU
分类号 H01L23/522;H01L21/28;H01L21/336;H01L21/768;H01L21/82;H01L21/8234;H01L27/08;H01L27/088;H01L27/118;H01L29/78;(IPC1-7):H01L21/265 主分类号 H01L23/522
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