| 摘要 |
PROBLEM TO BE SOLVED: To work a highly accurate finishing surface by polishing a workpiece by plural time polishing processes in which the reciprocative scanning direction of a polishing tool is changed in a device to polish the workpiece by reciprocatively scanning the workpiece by the polishing tool having a diameter smaller than the workpiece. SOLUTION: When polishing work is performed on a workpiece 1, the workpiece 1 is set on a rotary table 3, and a semispherical elastic member 4a installed on the tip of a small polishing tool 4 is scanned along a locus 11 of a recessed surface 1A of the workpiece 1, and polishing work of the workpice 1 is performed. After the rotary table 3 is rotated by 60 degrees in the clockwise direction from a condition of this first polishing process, the polishing tool 4 is moved for scanning similarly to the first polishing process. Afterwards, after the rotary table 3 is rotated by 120 degrees in the anticlockwise direction, the polishing tool 4 is moved for scanning similarly to the first and the second polishing processes. Therefore, ripples (very small waviness) are negated with each other, and configurational accuracy and surface roughness accuracy of the recessed surface 1A are improved. |
