| 摘要 |
PROBLEM TO BE SOLVED: To produce a film or a sintered compact free from ruggedness on the surface without depending on setting conditions by spraying the fine particles of ceramics or metal on the surface of a substrate, furthermore moving the substrate and spraying a high temp. gas on the fine particle adhering spot. SOLUTION: Toward a substrate 1, a fine particle jetting nozzle 2 and a high temp. gas jetting nozzle 4 with different angles with each other are arranged. From those, a fine particle jetting flow 3 and a high temp. gas flow 5 are respectively sprayed on the surface of the substrate 1. As this fine particles, the homogeneous ones of about <=1μm composed of ceramics or metal produced by a thermal plasma device e.g. by a hybrid plasma device with plural d.c. plasma and one high frequency plasma are preferably used. Furthermore, as for the high temp. gas, preferably, a high temp. gas of thermal plasma is mixed with the other gas for temp. control, and the temp. is controlled to about 2100±10 deg.C. This substrate 1 is rotated, a fine particle compacted body 6 formed by a fine particle jetting flow 3 is moved, and heating and sintering are executed by the high temp. gas flow 5 to obtain a film or a sintered compact 7 of ceramics or metal.
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