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发明名称
BUNSHISENEPITAKISHISOCHI
摘要
申请公布号
JP2664250(B2)
申请公布日期
1997.10.15
申请号
JP19890154580
申请日期
1989.06.19
申请人
HITACHI SEISAKUSHO KK
发明人
TAKAHASHI NUSHITO;UEDA SHINJIRO;KAWADA HIROKI;OGAWA YOSHIFUMI
分类号
C30B23/08;H01L21/203;(IPC1-7):C30B23/08
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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